New integration and patterning schemes used in 3D memory and logic devices have created manufacturing and yield challenges. Industrial focus has shifted from the scaling of predictable unit processes ...
In this article, as in industry, advanced process control (APC) refers primarily to multi-variable control. Multivariable control means adjusting multiple single-loop controllers in unison, to meet ...
Recently, a research group lead by Prof. Shuting Wang from topology optimization of Huazhong University of Science and Technology has put forward a massively efficient filter utilizing the splitting ...
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